High-Frequency RF Generators -- Spectrum 10513 AC Power Sources Data Sheets MKS Instruments, Inc.

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High-Frequency RF Generators -- Spectrum 10513

SPECIFICATIONS

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Number of Outputs	1
Frequency (MHz)	12.88 to 14.24
Power (watts)	10500
Style	Rack Mount
Phase	Three-Phase
Notes	High reliability, unconditional RF stability, DSP-based power control

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